INSPECTION APPARATUS, AN EXPOSURE DEVICE, AND A METHOD FOR MANUFACTURING A DEVICE, CAPABLE OF INSPECTING A FOREIGN MATERIAL ON A SURFACE OF AN OBJECT USING A CONTROLLER

摘要

PURPOSE: An inspection apparatus, an exposure device, and a method for manufacturing a device are provided to inspect a foreign material from a surface of the object using a controller.;CONSTITUTION: An inspection apparatus includes a projector(4), a first light receiver(8), a second light receiver(9), and a controller(11). The projector projects linear light(45) to a surface of an object. The first and second light receivers receive the scattered light from the surface of the object. The controller maintains the position relationship between the projector, the first light receiver, and the second light receiver. The controller determines the presence of the foreign material on the surface based on the intensity distribution of an output signal of the first and second light receivers.;COPYRIGHT KIPO 2010