THICKNESS AUTHENTICATION METHOD OF A NANOMETER OXIDE THIN FILM CAPABLE OF ACCURATELY MEASURING AND ANALYZING THICKNESS

摘要

PURPOSE: A thickness authentication method of a nanometer oxide thin film is provided to accurately measure and analyze thickness and interface of the nanometer oxide thin film which is less than 2mm.;CONSTITUTION: A thickness authentication method of a nanometer oxide thin film is as follows. Multiple oxide thin films with different thicknesses are attached. The thickness of the attached thin films is measured using a unit retroactive measuring method. The result is shown in an x-axis and a y-axis of a graphic form, and an offset and an inclination are calculated. The thickness of the films is authenticated by multiplying the result by the inclination.;COPYRIGHT KIPO 2010