CORRUGATED POLY-CRYSTAL SILICON CARBIDE MICRO RESONATOR BASED ON A POLY-CRYSTAL SILICON CARBIDE FILM, CAPABLE OF IMPROVING THE RESONANT FREQUENCY

摘要

PURPOSE: A corrugated poly-crystal silicon carbide micro resonator is provided to improve the resonant frequency as much as 60% than a flat type resonator by enabling the center part of a micro resonator formed by a poly-crystal silicon carbide film to be projected to the upper part and to be corrugated.;CONSTITUTION: A corrugated structure is formed by enabling the central part of a micro resonator to be projected to the upper part and to be corrugated. The length(L) of the poly-crystal silicon carbide micro resonator is 34-38um. The width(W) of a beam of the poly-crystal silicon carbide micro resonator is 11-13um. The width(C) of the corrugated part which is projected to the upper part of the poly-crystal silicon carbide micro resonator is 5-7um. The depth(d) of the poly-crystal silicon carbide micro resonator is 0.4um.;COPYRIGHT KIPO 2010