PHOTOACID GENERATOR INCLUDING AN AROMATIC RING CAPABLE OF CONTROLLING THE SPEED AND THE DISTANCE OF AN ACID DIFFUSION BY THE SIZE OF AN AROMATIC GROUP

摘要

PURPOSE: A photoacid generator is provided to properly control the transparency of an ArF light source and the acidity of an acid, and to reduce the Elution amount at a chemical amplifiable resist composition during an ArF immersion process.;CONSTITUTION: A photoacid generator has a structure marked as the chemical formula 1. In the chemical formula 1, X refers to alkylene with the carbon number of 1~10, or a hetero atom selected from a group consisting of -X1-O-X2-, N, S, and F. X1 and X2 refer to the alkylene with the carbon number of 1~10, respectively. Y refers to a hydrocarbon ring group with the carbon number of 5~30 including aromatic rings. Y1 and Y2 refer to alkyl groups with the carbon number of 1~6, respectively.;COPYRIGHT KIPO 2010