NOZZLE FOR SPRAYING A CLEANING SOLUTION AND A SUBSTRATE CLEANING DEVICE INCLUDING THE SAME, CAPABLE OF SPRAYING THE CLEANING SOLUTION WITH HIGH PRESSURE DROP

摘要

PURPOSE: A nozzle for spraying a cleaning solution and a substrate cleaning device including the same are provided to improve impurity removal effect by uniformly applying force to a substrate with an uneven structure of a spray nozzle.;CONSTITUTION: A cleaning solution spray nozzle(100) has cleaning solution spray holes(110). The cleaning solution spray holes sprays the cleaning solution on the substrate to clean the substrate and are formed on the lower side of the cleaning solution spray nozzle to face the substrate. The lower side has an uneven shape. A plurality of concave parts(122) or protrusions has the lower side.;COPYRIGHT KIPO 2010