DISC UNIT FOR CLEANING SUBSTRATES AND A SUBSTRATE CLEANING APPARATUS HAVING THE DISC UNIT, CAPABLE OF PREVENTING A LOSS OF CLEANING PERFORMANCE DUE TO WATER FILM BY SPRAYING CLEANING SOLUTION IN FINE PARTICLE SHAPE TROUGH AN INJECTION NOZZLE

摘要

PURPOSE: A disc unit for cleaning substrates and a substrate cleaning apparatus having the disc unit are provided to prevent the formation of water film between a grinding pad and a substrate surface when a grinding pad rubs against the surface of the substrate. ;CONSTITUTION: A disc unit(100) for cleaning substrates comprises a body(110), a grinding pad(120), an injection nozzle(130), and a supply passage. The grinding pad is installed in the lower part of the body and cleanses a substrate by grinding the surface of the substrate through contact. The lower part of the body is partially exposed by jetting holes(122) of the grinding pad. The injection nozzle is installed in the lower part of the body which is exposed by the jetting holes and sprays cleaning solution in the form of fine particles. The supply passage passes through the body and supplies the injection nozzle with cleaning solution.;COPYRIGHT KIPO 2011