METHOD FOR MANAGING A MENU OF A SEMICONDUCTOR MANUFACTURING FACILITY, CAPABLE OF MANAGING VARIOUS MENUS USING A USER INTERFACE

摘要

PURPOSE: A method for managing a menu of a semiconductor manufacturing facility is provided to easily search a necessary menu by managing various menus with a group according to various menus.;CONSTITUTION: Various menus are classified into a plurality of groups according to a situation(S132). A plurality of menus included in the classified groups are linked(S134). If a specific menu is selected, the group of the corresponding menu is displayed(S138). It is checked whether the selected menu is the group of a wanted situation(S140). A work is processed according to the wanted menu in the displayed menu group(S142).;COPYRIGHT KIPO 2010