LOW ENERGY, HIGH CURRENT, AND LARGE AREA BEAM MANUFACTURING DEVICE USING A MULTIPLE ELECTRODE, CAPABLE OF MAKING AN ION BEAM WITH HIGH CURRENT DENSITY, AND A TRANSPORT DEVICE THEREOF

摘要

PURPOSE: A low energy, high current, and large area beam manufacturing device and a transport device thereof are provided to obtain large area ion beam by variously forming the area and the shape of the ion beam.;CONSTITUTION: An ion source(10) is composed of a plasma electrode and a beam outlet electrode with a multiple output hole outputting light which has high current density and high energy which is greater than a predetermined output energy. A first decelerating electrode(20) is arranged with the ion source in parallel. The first decelerating electrode reduces the energy by decelerating the beams. An electrostatic lens(30) with a multiple structure is arranged to the first decelerating electrode in parallel. The electrostatic lens with a multiple structure focuses the decelerated beam. The second decelerating electrode(40) with the multiple structure is arranged to the electrostatic lens in parallel. The second decelerating electrode controls the final energy of the beam by decelerating the focused beam.;COPYRIGHT KIPO 2010