VISION SYSTEM FOR POSITIONING THE BONDING TOOL WHICH MEASURES THREE DIMENSIONAL POSITION OF THE BONDING TOOL AND REVISED

摘要

PURPOSE: It when bonding tool is compared with the location which the vision system for positioning wants the current position of the bonding tool transfers to the location wanting the bonding tool. The positional offset of the bonding tool is revised.;CONSTITUTION: A second screen index(13) is separated from the first mark(12) located on the bonding tool(10). High comparison images of marks are transmitted according to each first and second imaging paths coming out from marks. The first imaging path acts in order to the images of the second screen index and the first Fiducial mark the viewing. The optical system locates according to the second imaging path. Processor revises the positional offset of the bonding tool.;COPYRIGHT KIPO 2010