DEVICE AND METHOD FOR MEASURING SURFACE HEIGHT USING A LATERAL SCANNING WHITE-LIGHT INTERFEROMETER, CAPABLE OF MEASURING 3D INFORMATION WITH HIGH-SPEED

摘要

PURPOSE: A device and a method for measuring surface height using a lateral scanning white-light interferometer are provided to measure minute patterns in real time by measuring a two-dimensional structure or a three-dimensional structure.;CONSTITUTION: A device and for measuring surface height using a lateral scanning white-light interferometer comprises a light source(101), a collimating unit(102), a homodizer(103), a linear polarizing unit(104), a half-wavelength plate(110), a polarizing beam splitter(120), a reference mirror unit(130), and a photo-detector(150). The light source emits a beam of white-light. The collimating unit collimates the beam in parallel. The homodizer forms the collimated beam into a uniform energy. The linear polarizing unit passes through the linear polarized beam. The half-wavelength plate maximizes the contrast of the white light. The polarizing beam splitter divides the polarized beam into a reference beam(123) and a measurement beam(124). The reference mirror unit reflects the reference beam.;COPYRIGHT KIPO 2010