SPECIMEN HOLDER APPARATUS OF A SCANNING ELECTRONIC MICROSCOPE, CAPABLE OF ENHANCING PRECISION AND RELIABILITY ON A PRECISE ANALYSIS BY FIRMLY FIXING SPECIMEN

摘要

PURPOSE: A specimen holder apparatus of a scanning electronic microscope is provided to enhance precision and reliability on precise analysis by controlling phase flow during observation by firmly fixing specimen and to analyze big and heavy specimen precisely and stably.;CONSTITUTION: A specimen holder apparatus of a scanning electronic microscope comprises a holder support member(10), a movable guide base member, a movable jaw member(30), and a specimen fixing bolt(40). The holder support member is installed on the top of the specimen holder stage of the scanning electronic microscope. The holder support member is protruded to the top of the specimen holder stage. The movable guide base member is installed on the top of the holder support member and includes a fixed jaw member which is formed at one side of the movable guide base member. The movable jaw member is movably coupled with the movable guide base member. The movable jaw member comprises a fixture fixing the moved location. The specimen fixing bolt is coupled to the movable jaw member to be passed through the inside of the movable jaw member making contact with the specimen.;COPYRIGHT KIPO 2010