PRESSURE SENSOR FOR ULTRA-LOW PRESSURE CAPABLE OF ACCURATELY MEASURING AN OUTPUT SIGNAL BY CORRECTING THE ERRORS OF A PRESSURE SENSOR, AND A DRIVING METHOD THEREOF

摘要

PURPOSE: A pressure sensor for ultra-low pressure and a driving method thereof are provided to easily measure an ultra-low pressure signal by amplifying the pressure signal through a first amplification unit and a second amplification unit.;CONSTITUTION: A pressure sensor(100) outputs a pressure signal. A first amplification unit(210) amplifies the pressure signal with a first amplification factor. A temperature sensing unit(220) outputs a temperature signal. A memory(240) stores a second amplification factor and an offset correction value for each temperature span. A microcontroller(230) produces the offset correction value and the second offset correction value which correspond to the temperature signal. The offset correction part carries out an offset correction in regard to the pressure signal. A second amplification unit outputs a final signal by amplifying an offset-corrected pressure signal with the second amplification factor.;COPYRIGHT KIPO 2010