PRESSURE CONTROL DEVICE FOR CORRECTING FLATNESS OF SUBSTRATES, WHICH EQUALIZES THE PLANARITY OF AN UPPER PLATEN

摘要

PURPOSE: A pressure control device for correcting flatness of substrates is provided to secure the uniform planarity of product and total thickness variation.;CONSTITUTION: A pressure control device for correcting flatness of substrates comprises a plurality of pressure controllers. A pressure controlling part gives pressure at least over one spot of the outer circumference of an upper platen(200), and corrects a planarity of the substrate. The pressure controlling part comprises a pressure settling unit(120) and a pressure adjustment unit(110a). The pressure settling unit forms a supporting force. The pressure adjustment unit connected to the pressure settling unit gives a tensile force to outside.;COPYRIGHT KIPO 2010