ALUMINOUS SINTER, PROCESS FOR PRODUCING THE SAME, MEMBER FOR SEMICONDUCTOR PRODUCTION APPARATUS, MEMBER FOR LIQUID-CRYSTAL-PANEL PRODUCTION APPARATUS, AND MEMBER FOR DIELECTRIC RESONATOR

摘要

[PROBLEMS] To provide: an aluminous sinter capable of lowering dielectric dissipation factor in the megahertz to gigahertz bands; a process for producing the sinter; a member for semiconductor production apparatuses; a member for liquid-crystal-panel production apparatuses; and a member for dielectric resonators. [MEANS FOR SOLVING PROBLEMS] The aluminous sinter comprises at least 99.3 mass% aluminum in terms of Al₂O₃ and other elements including at least 0.05 mass% silicon in terms of SiO₂ and at least 0.01 mass% strontium in terms of SrO, is constituted of alumina crystal grains (1) as main crystal grains, and has a crystal phase at triple points (2) constituted of alumina grain particles (1), the crystal phase containing the elements Si, Al, Sr, and O. This aluminous sinter can retain the excellent corrosion resistance, mechanical properties, and electrical properties of alumina. In addition, since the crystal phase comprising a compound containing the elements Si, Al, Sr, and O and having a low loss is present at the triple points (2) constituted of alumina crystal grains (1), the aluminous sinter can have a lower loss than conventional ones in the megahertz to gigahertz bands.;COPYRIGHT KIPO & WIPO 2010