ALUMINOUS SINTER, PROCESS FOR PRODUCING THE SAME, MEMBER FOR SEMICONDUCTOR PRODUCTION APPARATUS, MEMBER FOR LIQUID-CRYSTAL-PANEL PRODUCTION APPARATUS, AND MEMBER FOR DIELECTRIC RESONATOR

摘要

(tasks) that can decrease the dielectric loss tangent of the MHz ~ GHz for quality sintered alumina, As a production method, a member for semiconductor manufacturing equipment, and provides a liquid crystal panel member production apparatus, and dielectric resonator for members. (Solving means) Al The Al ₂ O ₃ and contained 99.3% by weight or more in terms of, SiO, Si as the other elements ₂ 0.05 in terms of % by weight or more, containing 0.01% by weight or more in terms of SrO and Sr, the alumina crystal grains (1) is made by the main crystal grains, the triple point (2) consisting of alumina crystal grains (1) Si, Al, the crystal phase containing the respective elements of Sr, and O are present. Excellent corrosion resistance and mechanical properties of the alumina, and the electrical properties can be maintained as well as, the alumina crystal particles (1) consisting of a triple point (2) on Si, Al, low loss crystal phase is made of a compound containing an element Sr and O can be obtained than in the conventional alumina sintered MHz for the loss due to the presence of ~ GHz for. ;