METHOD FOR FORMING A SILICON LAYER MADE OF POLY-CRYSTAL SILICON BY USING A MICRO HEATER, A METHOD FOR FORMING A PN JUNCTION AND THE PN JUNCTION MADE BY THE SAME

摘要

PURPOSE: A method for forming a silicon layer, a method for forming a pn junction, and the pn junction made by the same are provided to improve the quality of the pn junction by forming the silicon layer made of large grains.;CONSTITUTION: A micro heater comprising a substrate(10) and a metal pattern(30) separated from the substrate is prepared. A metal pattern is heated by applying the voltage to a metal pattern. A silicon layer(100) is formed on the metal pattern to expose the micro heater to the source gas. The source gas includes silicon. The silicon layer is made of the poly crystal silicon. An amorphous silicon layer is formed on the substrate.;COPYRIGHT KIPO 2010