CONTAINER WHICH CONTAINS A THIN PLATE, CAPABLE OF FIRMLY SUPPORTING THE THIN PLATE REGARDLESS OF THE WEIGHTS OF SILICON WAFERS

摘要

PURPOSE: A container which contains a thin plate is provided to prevent the generation of particles by protecting a contact part from friction.;CONSTITUTION: A main body(2) of a container receives a plurality of thin plates. A cover seals the inside of the main body. A thin-plate supporting unit supports the thin plates which are arranged with constant intervals. A supporting protrusion(6) is located on the inner sidewall(2A) of the main body. A cover-receiving unit(7) is located on the opening part of the main body. Supporting units(10) are installed to the four corners of the cover-receiving unit.;COPYRIGHT KIPO 2010