THIN FILM EMBEDDED RESISTOR PREPARED USING A CERAMIC-METAL NANO-COMPOSITE, HAVING THERMAL STABILITY

摘要

PURPOSE: A thin film embedded resistor prepared using a ceramic-metal nano-composite is provided to increase the integration of a circuit, thereby allowing a user to implement a fine pitch member.;CONSTITUTION: An oxidation silicon - platinum nano-composite is deposited on a substrate to distribute platinum particle inside a matrix. The oxidation silicon - platinum nano-composite has an atomic ratio of 67:33 or 42:58 of oxidation silicon and platinum, respectively. The size of the platinum particles distributed within the oxidation silicon matrix is 3-5 nm. The thin film embedded register has 3K at a TCR of 100 ppm.;COPYRIGHT KIPO 2011