AUTOMATIC LANDING METHOD, LANDING APPARATUS OF SCANNING PROBE MICROSCOPE AND SCANNING PROBE MICROSCOPE USING THE SAME

摘要

PURPOSE: A method and a device for automatically landing a probe microscope and the probe microscope thereof are provided to divide a landing step despite a condition change, thereby automatically landing a probe. CONSTITUTION: A laser unit applies a Gaussian laser beam to the cantilever of a probe microscope. An image information collecting unit collects reflective light generated on a sample surface by the Gaussian laser beam. A controller obtains average illumination intensity of the reflective light by the collected light. The controller determines an operating profile of the probe according to the average illumination intensity. A landing unit handles the probe according to an operating signal from the controller.