THIN FILM GAS SENSOR WITH HIGH ACTIVITY, WHICH CAN USE CORE-SHELL STRUCTURE COMPLEX NANO PARTICLES AS SENSING MATERIALS AND A MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A thin film gas sensor with high activity, which can use core-shell structure complex nano particles as sensing materials and a manufacturing method thereof are provided to improve the sensitivity and long term stability of a gas sensor.;CONSTITUTION: A thin film gas sensor with high activity comprises a core-shell structure complex nano particle(10). The core-shell structure complex nano particle is made of a metal nano- particle core(110) and a metal oxide nano-particle shell layer(130). The metal oxide nano-particle shell layer is composed in order to surround the surface of a core. The metal nano-particle core is made of difficult metal nano-particle to prevent oxidation. The metal nano-particle core improves the movement of electronics.;COPYRIGHT KIPO 2011