PILLAR ARRAY PLATFORM, METHOD OF MASK USING PILLAR ARRAY PLATFORM, AND METHOD OF TREATING SURFACE USING MASK

摘要

PURPOSE: A pillar array platform, a manufacturing method of a mask using thereof, and a surface processing method using the mask are provided to secure the high pattern fidelity and the structural strength of a pillar. CONSTITUTION: A pillar array platform(100) for manufacturing a mask comprises the following: a substrate(110); and a pillar array formed with a pillar(120) including the aspect ratio of 5~30 on the substrate. The substrate includes a glass, a metal, silicon, or a polymer. The pillar is a cured material of a photo-crosslinkable adhesive composition. The pillar has the height of 1~6 millimeters, and the thickness of 100~1,000 micrometers.