CONCERN IN WHICH THE CHANGE OF THE SURFACE SHAPE OCCURS VERY LOWS THE INSPECTING METHOD OF THE PHOTO MASK BLANK OR THEIR MANUFACTURE INTERMEDIATE AND METHOD FOR DESCRIMINATING QUALITY

摘要

PURPOSE: The inspecting method of the photo mask blank or their manufacture intermediate and method for discriminating quality. The dimension error generation by the change of the surface shape can diminish.;CONSTITUTION: The inspecting method of the photo mask blank or their manufacture intermediate and method for discriminating quality. The surface shape of the photo mask blanks(101, 102) having the checking object of the stress film or their manufacture intermediate is measured. The checking object film is eliminated.;COPYRIGHT KIPO 2011