A Novel Method of sealing airgap between electrode and ceramic layers in Co-fired Multilayer Ceramic Devices, using electrophoresis deposition method

摘要

PURPOSE: A method for sealing an air gap of multilayer ceramic devices using electrophoresis deposition is provided to control an inner crevice by sealing the level difference between the electrode and the ceramics with the ceramic powder. CONSTITUTION: A laminate forms an inner electrode film(200) in a ceramic tape(100). A stack ceramic element is comprised of the laminates in the solvent in which the ceramic powder(400) is dispersed. The electrode film of the stack ceramic element is connected to the positive power. A counter electrode(300) located in the solvent is connected to the negative power. The air gap is sealed by transferring the ceramic powder to the electrode film by the electrophoresis deposition. The air gap is generated by the level difference between the ceramic tape and the electrode film.