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METHOD FOR FABRICATION OF MULTILAYER OPTICAL WAVEGUIDE STRUCTURE AND MULTILAYER OPTICAL WAVEGUIDE STRUCTURE
METHOD FOR FABRICATION OF MULTILAYER OPTICAL WAVEGUIDE STRUCTURE AND MULTILAYER OPTICAL WAVEGUIDE STRUCTURE
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机译:多层光学波导结构的制造方法及多层光学波导结构
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摘要
at least two of the substrate has a laminated structure , which is formed on the side of the core region and the core region a method for manufacturing an optical wiring laminate disposed between the optical wiring layer , a substrate having a lateral cladding region , the optical wiring layer is formed of a polysilane composition containing polysilane , and a first block comprising a substrate of one , a second block comprising a substrate of the other , either one of the optical wiring layer or the cladding layer formed on the surface of the block and overlapping via , by heating and pressurization in this state, the optical wiring layer as an adhesive layer or a first block of the cladding layer and characterized in that the laminate is bonded to a second block .
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