Transfer chamber and transfer method using the same

摘要

The present invention relates to a transfer chamber and a substrate transfer method, and more particularly, the rotation and feeding of the substrate It is related to the transfer chamber and a substrate transfer method that can be performed on a single device. ; transport chamber according to the present invention comprises a substrate formed half the inlet and outlet chamber body half board; A rotary table which is imported wit half board through the substrate entrance; Rotating means for rotating the rotary table; Lifting means for lifting the rotary table; Transfer table for mounting a substrate transferred from the rotary table; It includes; and transfer means for transferring the transfer table to the substrate half-exit direction.