首页> 外国专利> Stamp for superhydrophobic micro/nano hybrid surface based on anodic aluminum oxide, method of manufacturing the same, and product manufactured with the same

Stamp for superhydrophobic micro/nano hybrid surface based on anodic aluminum oxide, method of manufacturing the same, and product manufactured with the same

机译:用于基于阳极氧化铝的超疏水微/纳米混合表面的印模,其制造方法以及用其制造的产品

摘要

PURPOSE: A stamp, a manufacturing method, and a product thereof are provided to implement a minute pattern using a simple process by using a solidified photoresist. CONSTITUTION: An anodic aluminum oxide template with a plurality of nano holes is formed(S1). A photoresist is spread on the anodic aluminum oxide template(S2). A plurality of photoresist holes are formed so that the top surface of the anodic aluminum oxide template is exposed by patterning the photoresist(S3). A metal is laminated on the surface of the anodic aluminum oxide template exposed by the hole of the photoresist(S4). A stamp consisting of the metal including aluminum oxide by removing a remaining photoresist is manufactured(S5). At least one between an interval between neighboring photoresist holes and a diameter is microscopic.
机译:目的:提供一种印模,一种制造方法及其产品,以通过使用固化的光致抗蚀剂以简单的工艺实现微小的图案。组成:形成具有多个纳米孔的阳极氧化铝模板(S1)。将光致抗蚀剂散布在阳极氧化铝模板上(S2)。形成多个光致抗蚀剂孔,从而通过对光致抗蚀剂进行构图来暴露阳极氧化铝模板的顶表面(S3)。在通过光致抗蚀剂的孔暴露的阳极氧化铝模板的表面上层压金属(S4)。通过去除残留的光致抗蚀剂来制造由包含氧化铝的金属组成的压模(S5)。相邻的光致抗蚀剂孔之间的间隔与直径之间的至少一个是微观的。

著录项

  • 公开/公告号KR100987987B1

    专利类型

  • 公开/公告日2010-10-18

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20080084961

  • 发明设计人 김동성;

    申请日2008-08-29

  • 分类号H01L21/027;

  • 国家 KR

  • 入库时间 2022-08-21 18:30:42

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