Method for the determination of the topology by the substrate and a coordinates - measuring machine caused by the systematic error during the vermesung of positions of the edges of the structures of a substrate

摘要

Method for the determination of the topology by the substrate and a coordinates - measuring machine systematic error caused in the measurement of positions of the edges of structures (3) of a substrate (2), wherein the substrate (2) in a measuring table (20) by means of three stopping points (30) is in a plane which is characterized by the following steps:– that on a plurality of positions on a surface (2a) of the substrate (2) in each case a position in the x -, y - and z - coordinate direction is measured;– that the substrate (2) to an x / y - plane of the coordinates - measuring machine parallel axis (70) is inclined, and a of the supporting points (30) a spacer element (35) is placed, so that an inclined position is adjusted, wherein the substrate (2) in order to the parallel axis (70) to the x / y - plane (20a) of the coordinates - measuring machine is inclined;– that the position in the x -, y - and z - coordinate direction at least one edge (3a) to the plurality of the positions of the structures on the surface..