Method for manufacturing sensor element of exhaust sensor in layer form, particularly for measurement of gas concentration, involves providing electrode and diffusion barrier of sensor element

摘要

The method involves providing an electrode (32) and diffusion barrier (41) of a sensor element (10), and carrying material of the diffusion barrier for adjusting a diffusion resistance of the diffusion barrier. The diffusion resistance of the diffusion barrier is determined. Depth controlling of material removal is carried out by the value of the determined diffusion resistance of the diffusion barrier.