Exhaust gas pressure difference detecting device i.e. capacitive pressure sensor, for use in automobile, has two electrode elements, where one of elements is connected with membrane such that capacitance between elements is changed

摘要

The device i.e. capacitive pressure sensor (100), has an exposed membrane (110) that deforms during application of pressures (p1, p2) to sides of membrane. A spatial electrode device (120) has two electrode elements (131, 132), where the electrode device is separate from the membrane. One of the elements is connected with the membrane such that arrangement of the element is changed in relation to other element during deformation of membrane to change the capacitance between the elements. The elements are movably and fixedly arranged in a cavity in the electrode device respectively. An independent claim is also included for a method for detecting pressure difference.