Micro-mirror, has electrostatic drive for adjusting two mirror elements with respect to holder, light window and reflective surface around two rotational axes, respectively, where axes are aligned parallel to each other

摘要

The micro-mirror has mirror elements (10, 12) coupled to a holder (14), a light window (16) i.e. glass lid, and a reflective surface (22) i.e. passive reflector, so that a light beam (20) i.e. laser beam, reflected at one of the elements is directly or indirectly deflectable to the other element. An electrostatic drive adjusts the elements with respect to the holder, window and surface around rotational axes, respectively, where the axes are aligned parallel to each other. The elements are connected with an intermediate frame by two springs (10a, 12a) i.e. torsion springs, respectively.