Component, the production process for an organic electronic component, a production apparatus for an organic electronic component, substrate processing system, protection film structure and storage medium with the stored control program

摘要

Organic electronic component, comprising:a formed on a target object organic element; anda protective film of the organic element,the protective film comprises:a stress relieving layer, which is formed such that it is adjacent to the organic element and the organic element anda carbon component contains and no nitrogen components; anda sealing layer, which on the voltage degradation ends layer is formed and a nitrogen component contains.