Drive unit for transport device of vacuum processing system, has traction element guided around two deflecting rollers, where traction element comprises continuous stainless steel strip

摘要

The drive unit has a traction element (4) guided around two deflecting rollers (2), where the traction element comprises a continuous stainless steel strip. The traction element has circular perforations that are evenly spaced apart in longitudinal direction of the traction element, where two of the perforations are provided side by side in transverse direction of the traction element. Each deflecting roller has cylindrical nubs uniformly distributed over a periphery of the deflecting roller, so that the nubs mesh with the perforations. Independent claims are also included for the following: (1) a vacuum processing system comprising a vacuum chamber (2) a transport device comprising a storage unit.