Heat conductivity detector for gas analyzer, has parylene layer that is formed in detector, and electrically heatable heater filaments that are mounted on center part of channel, where contact areas are releasable from parylene layer

摘要

The detector has electrically heatable heater filaments (6, 6') mounted on a center part of a channel (5) through which fluid flows. The filaments are held at both ends of electrically conducting carriers (7, 7', 8, 8') transverse to the channel. The carriers are formed on a carrier plate (1) with a groove (2). The carriers in contact areas (9, 9', 10, 10') are terminated on the plate, where the areas are not covered by the plate. A parylene layer (13) is formed in the detector, where the contact areas are releasable from the parylene layer. An independent claim is also included for a method for manufacturing a heat conductivity detector.