Ion source for generating a particle beam, an electrode for an ion source as well as a method for the introduction of a gas to be ionized in an ion source

摘要

An ion source (2) for generating a particle beam comprises a plasma chamber (4) and an electrode (8) which are suitable for the plasma chamber (4) extends. A to ionizing gas, via a gas duct into the ion source (2) is initiated, wherein the gas line (6) extend over the entire length of the electrode (8) parallel to the electrode (8), so that, the gas in the immediate vicinity of an inlet (4) of the plasma chamber (4) from the gas line (6) flows out.