Optical element e.g. facet, positioning device for use in e.g. field facet mirror for extreme-ultraviolet micro lithography, has alignment rod and actuation mechanism that are actuated, such that orientation of optical element is changed

摘要

The device (1) has a storage rack (4) including a storage area (6) for storing an optical element (2) in different orientation, where the storage area is formed in truncated conical shape, angular shape, wedge-shape, or truncated pyramid shape. An alignment rod (3) and an actuation mechanism (5) are actuated by actuation force, such that the orientation of the element is changed, where the alignment rod and the actuation mechanism are self-lockably implemented. The actuation mechanism includes two rotary cylinders (9, 10) arranged into each other. An independent claim is also included for a mirror element including a mirror with a spherical segment-shaped storage area.