method and device for treating the surface of at least one partial component with at least one vacuum chamber to erzeugendem niederdruckplasma

摘要

The process involves coupling at least one process bell (12) which contains the reaction chamber (16) with the opening of a portable self-sufficient miniaturised ND-plasma reactor (1) movable through a flexible supply line (14) to the vacuum chamber (4) of the reactor and sealingly closing the opening of the reaction chamber through the part of the component surface which is to be treated so that the reaction chamber is evacuated and ionised particles of the process gas can be continuously directed out of the vacuum chamber into the reaction chamber of the process bell by energy excitation through microwaves, radio frequency excitation or other HF excitation. The ionized particles can then be brought to act in the process bell on the part of the component surface which is to be treated. An independent claim is included for the partial treatment of a surface with low pressure plasma having a process bell coupled by a flexible supply line (14) to a vacuum chamber to form a portable self-sufficient miniaturized ND plasma reactor. The opening of the bell is sealed closed through the part of the component surface to be treated and a continuous supply of ionized process gas particles can be fed into reaction chamber of bell to act on the component surface.