MICRO-SENSOR MADE IN MICROSYSTEM TECHNOLOGIES FOR THE MEASUREMENT AND / OR DETECTION OF ENCRYPTION.

摘要

Sensor (10) for measuring or detecting fouling, produced according to micro-electronic manufacturing technologies and comprising, in the form of a plurality of superposed layers: at least one heating element (14) which is suitable to distribute, on command, a controlled homogeneous heat flow; at least one temperature measuring element (16) placed in the heat flux diffused by the heating element; at least one interface element (18) ensuring the transmission of the heat flux diffused beyond said at least one temperature measuring element