ZINC OXIDE TRANSPARENT CONDUCTIVE FILM FORMING MATERIAL, METHOD OF MANUFACTURING THE SAME, TARGET USING THE SAME AND METHOD OF FORMING ZINC OXIDE TRANSPARENT CONDUCTIVE FILM

摘要

PROBLEM TO BE SOLVED: To provide a zinc oxide transparent conductive film forming material capable of forming the zinc oxide transparent conductive film with excellent conductivity and chemical durability and its manufacturing method, and to provide a forming method of a target and the zinc oxide system transparent conductive film.;SOLUTION: The zinc oxide transparent conductive film forming material is substantially composed of zinc, titanium, oxygen and nitrogen, and the transparent conductive film forming material is an oxide mixture or an oxide sintered body wherein the nitrogen and the titanium are contained so that titanium is contained as an atom number ratio Ti/(Zn+Ti)=≥0.02-0.1 and nitrogen and titanium are contained as an atom number ratio N/Ti=0.1-0.6, and the oxide mixture is composed of a zinc oxide phase, a low valence titanium oxide phase and a titanium nitride phase and the oxide sintered body is composed of the zinc oxide phase, a zinc titanate phase and the titanium nitride phase.;COPYRIGHT: (C)2012,JPO&INPIT