QUARTZ CRYSTAL MICROBALANCE GAS SENSOR AND GAS MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To accurately detect a trace amount of substances present in an atmosphere to be detected in relation to a quartz crystal microbalance gas sensor and a gas measuring method.;SOLUTION: The quartz crystal microbalance gas sensor includes a quartz plate, a pair of sensor electrodes arranged in the central portion of the both main faces of the quartz plate, a sensor support body for supporting the periphery portion of the quartz plate, and a temperature regulating means in between the periphery portion of the quartz plate and the sensor electrode for cooling the sensor electrode side to a relatively low temperature.;COPYRIGHT: (C)2012,JPO&INPIT