TUNING FORK FLEXURAL CRYSTAL VIBRATION ELEMENT WAFER AND METHOD FOR MANUFACTURING THE SAME, AND METHOD FOR MANUFACTURING TUNING FORK FLEXURAL CRYSTAL VIBRATION ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a tuning fork flexural crystal vibration element wafer capable of preventing a burr from attaching to a tuning fork flexural crystal vibration element, to provide a method for manufacturing the tuning fork flexural crystal vibration element wafer, and to provide a method for manufacturing a tuning fork flexural crystal vibration element.;SOLUTION: The tuning fork flexural crystal vibration element wafer includes: a crystal piece having a base and two vibrating arm portions each extending from the base in the same direction, a frame portion of the tuning fork flexural crystal vibration element wafer, and a coupling portion in which the base of the crystal piece is coupled to the frame portion. In the wafer, a curved recess is formed on the coupling portion. Accordingly, since the etching residue around the coupling portion of the crystal piece is not attached to the tuning fork flexural crystal vibration element, a burr can be prevented from being formed.;COPYRIGHT: (C)2011,JPO&INPIT