PROBER DEVICE INCLUDING SCANNING ELECTRON MICROSCOPE, AND PROBE CLEANING METHOD OF THE PROBER DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a prober device capable of suppressing generation of an oxide film on a probe needle.;SOLUTION: This prober device includes a cleaning chamber 5 including a mechanism for cleaning a probe of a probe unit 4 of the prober device by dry processing using ion or the like in vacuum, and a measuring mechanism (a preparation chamber 3, a conveyance device 12, a test wafer 13, and a gate valve 6) for confirming electrical measurement of the probe of the probe unit 4 in vacuum. The probe is not exposed to the atmosphere after removing an oxide film on a measuring probe in the vacuum cleaning chamber 5. Hereby, stable measurement of an electric characteristic can be performed to an inspection object.;COPYRIGHT: (C)2011,JPO&INPIT