ULTRASONIC WASHING METHOD, ULTRASONIC WASHING APPARATUS AND METHOD FOR PRODUCING PROPAGATION WATER USED FOR ULTRASONIC WASHING

摘要

PROBLEM TO BE SOLVED: To provide an ultrasonic washing method by which washing unevenness that is a problem at ultrasonic washing can be canceled and particles can be effectively removed.;SOLUTION: In the ultrasonic washing method, at least a material to be washed is immersed in washing liquid in a washing tank and ultrasonic waves produced by an ultrasonic vibrator are propagated to the washing liquid via propagation water in a propagation tank to wash the material to be washed. As the propagation water, degassed pure water in which dissolving gas is dissolved with 35 to 70% concentration toward saturation concentration is used.;COPYRIGHT: (C)2011,JPO&INPIT