SUBSTRATE PROCESSING APPARATUS, SUBSTRATE STORAGE POD OPENING AND CLOSING DEVICE, METHOD FOR PROCESSING SUBSTRATE, METHOD FOR CONVEYING SUBSTRATE, AND METHOD FOR OPENING AND CLOSING SUBSTRATE STORAGE POD

摘要

PPROBLEM TO BE SOLVED: To enhance throughput by shortening a lead time. PSOLUTION: The substrate processing apparatus includes: a plurality of substrate loading ports set in a vertical direction, each of the substrate loading ports being adapted to take a substrate in and out of a substrate pot containing a plurality of substrates and having a cap to be freely opened and closed; and an opening and closing unit 20 provided on each of the substrate loading ports which individually move the cap in a horizontal direction while holding the cap by a closure 40 when the cap of the substrate pod mounted on the substrate loading port is opened and closed, the closure 40 for holding the cap of the substrate pod mounted on the plurality of substrate loading ports being provided respectively. PCOPYRIGHT: (C)2011,JPO&INPIT