ORDERED STRUCTURE EVALUATION METHOD AND ORDERED STRUCTURE EVALUATION DEVICE

摘要

PPROBLEM TO BE SOLVED: To provide a method for evaluating an ordered structure of a material having the ordered structure. PSOLUTION: An ordered structure evaluation method, using image data capable of recognizing an atomic sequence of an imaging object, includes the steps of providing Fourier transform processing, spatial frequency filtering processing, and inverse Fourier transform processing for the image data to generate data indicating a distribution of an image intensity of the ordered structure to be evaluated, obtaining a pixel position of a boundary of a region having the ordered structure from the image data, and obtaining an image intensity corresponding to an image position obtained in the step from the data indicating the image intensity. PCOPYRIGHT: (C)2011,JPO&INPIT