METHOD AND DEVICE FOR DETERMINING GEOMETRIC PROPERTY OF TEST OBJECT AND OPTICAL PROFILING SYSTEM

摘要

PROBLEM TO BE SOLVED: To determine a geometric property of a test object based on a spatial relationship between first and second datum surfaces in addition to interferometrically profiling a first and second surface of the test object.;SOLUTION: This invention is characterized by a method for determining a geometric property of a test object. The method includes steps for: interferometrically profiling a first surface of the test object with respect to a first datum surface; interferometrically profiling a second surface of the test object with respect to a second datum surface different from the first datum surface; providing a spatial relationship between the first and second datum surfaces; and calculating the geometric property based on the interferometrically profiled surfaces and the spatial relationship between the first and second datum surfaces. In some embodiments, the spatial relationship can be determined by using calibrated gage blocks or by using a displacement measuring interferometer. A corresponding system is also described.;COPYRIGHT: (C)2011,JPO&INPIT