GEOMETRICAL PROPERTIES CALCULATING METHOD FOR OBJECT TO BE MEASURED, GEOMETRICAL PROPERTY PROGRAM, AND PROFILE-SHAPE MEASURING INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To automate or semi-automate working for assigning the range used for calculating a geometrical properties of the profile shape from among shape measured data, when calculating the geometrical properties of the profile shape, using the shape measured data of the measured profile shape formed on a surface of an object to be measured.;SOLUTION: This profile-shape measuring instrument 1 is provided with an alignment part 61 for aligning a design data, including a geometrical element for specifying the profile shape with the shape-measured data of the profile shape of an object surface to be measured formed according thereto; and a data range determining part 63 for determining an outer end of a profile shape measured range, formed corresponding to the geometric element from among the shape measured data, based on the position of the outer end of the geometrical element, included in the design data aligned to the shape measured data.;COPYRIGHT: (C)2008,JPO&INPIT