Method and devices for the determination of a geometric property of a test against state as well as optical profile measuring system

摘要

A method for determining a geometric property of a test against state, which method comprises:interferometric profile measurement of a first surface of a test against state in relation to a first reference surface;interferometric profile measurement of a second surface of the test against state in a second coordinate system with respect to a second reference surface, which is different from the first reference surface;Provision of a spatial relationship between the first and second reference surface; andCalculating the geometric property on the basis of the surfaces, in which an interferometric profile measurement was carried out, and the spatial relationship between the first and second reference surface, whereinthe first and second surface opposite outer surfaces of the test against state correspond to correspond to the adjacent outer surfaces, which are separated by a step height, or are not parallel, there is nominally.