LASER PROCESSING DEVICE, APPARATUS FOR MANUFACTURING OF SOLAR CELL PANEL, SOLAR CELL PANEL, AND LASER PROCESSING METHOD

摘要

PPROBLEM TO BE SOLVED: To improve productivity and to simplify mechanism by suppressing generation of powder during rinsing after thin film processing by laser scribe treatment. PSOLUTION: The apparatus includes a laser processing device 10 which generates a transformation laser beam L1 to irradiate the thin film laminated on a substrate 2 and a peeling laser beam L2 to irradiate portions on the thin film that have been irradiated by the transformation laser beam L1 by tracing them, and a stage shifting section 12 which relatively moves the laser processing device 10 and the substrate 2. Thus the powder generated during the laser scribe treatment can be significantly or completely eliminated. Moreover, even if the powder is generated, the powder is transformed from the thin film so that it does not stick or fix to the thin film and can be easily removed by simple rinsing. PCOPYRIGHT: (C)2011,JPO&INPIT