The optical radiation means which the autocollimator and the goniometry

摘要

PROBLEM TO BE SOLVED: To provide an auto-collimator capable of simultaneously accomplishing a simplification of the constitution, provision of a sufficient angle resolution, and enhancement of the operating easiness.;SOLUTION: The auto-collimator 10 is equipped with: a measuring optical system 16 for conducting measurement on the basis of the image pickup position at a measuring image pickup point 42 of the reflected pattern light 32 from the measuring surface 30a; and a wide-range observing optical system 18 for performing a wide-range observation on the basis of the image pickup position at a wide-range observing image pickup point 46 of the reflected pattern light 32 from the measuring surface 30a; wherein the measuring optical system 16 has a tele-type optical system 34 including a front stage lens 38 having a positive power with the lens overall length designed shorter than the focal distance and a rear stage lens 40 having a negative power installed on the image pickup side of the front stage lens 38, while the wide-range observing optical system 18 includes the front stage lens 38 of the measuring optical system 16, and further an optical path branching means 20 is installed between the front stage lens 38 and the rear stage lens 40.;COPYRIGHT: (C)2007,JPO&INPIT