In the convergence ion beam process manner which does convergence ion beam process manner and thin layer conversion processing

摘要

PROBLEM TO BE SOLVED: To provide an FIB processing method capable of removing a strain generated in a slicing course, and performing finish machining with a sliced part stably fixed.;SOLUTION: This FIB processing method for slicing a sample by FIB irradiation is characterized as follows: the sliced part is formed by the FIB irradiation; notching is performed by tilting a sample stand so as to remain a connection part on a part of the upper end on the side part of the sliced part; and then the sample stand is returned into the original attitude, and finish machining of the sliced part is performed by the FIB irradiation.;COPYRIGHT: (C)2007,JPO&INPIT